Case ASML: Wafer Heating
The case will guide you through the steps of an ASML metrology engineer trying to diagnose the issue with the new wafer heating correction model. You will be learning about the model’s purpose and inner workings, studying machine measurement data, and proposing experiments in an attempt to pinpoint the problem and fix it.
Who, what, where, when...
- Who
- Committee for Lectures and Excursions
- What
- Case ASML: Wafer Heating
- Where
- —
- When
-
Wednesday 4 May 2022
from 16:00
until 19:00
- Costs
- free
