Case ASML: Wafer Heating

The case will guide you through the steps of an ASML metrology engineer trying to diagnose the issue with the new wafer heating correction model. You will be learning about the model’s purpose and inner workings, studying machine measurement data, and proposing experiments in an attempt to pinpoint the problem and fix it.

Who, what, where, when...

Who
Committee for Lectures and Excursions
What
Case ASML: Wafer Heating
Where
When
Wednesday 4 May 2022 from 16:00 until 19:00 iCal-link
Costs
free