[Cancelled] Case ASML: Wafer Heating

This case is cancelled and will be moved to another date in the next academic year

The case will guide you through the steps of an ASML metrology engineer trying to diagnose the issue with the new wafer heating correction model. You will be learning about the model’s purpose and inner workings, studying machine measurement data, and proposing experiments in an attempt to pinpoint the problem and fix it.

Unfortunately, you cannot enroll for this activity anymore, as the enrollment period has ended.

Who, what, where, when...

Who
Committee for Lectures and Excursions
What
[Cancelled] Case ASML: Wafer Heating
Where
Hal B 2B
When
Wednesday 4 May 2022 from 16:00 until 20:00 iCal-link
Costs
free