[Cancelled] Case ASML: Wafer Heating
This case is cancelled and will be moved to another date in the next academic year
The case will guide you through the steps of an ASML metrology engineer trying to diagnose the issue with the new wafer heating correction model. You will be learning about the model’s purpose and inner workings, studying machine measurement data, and proposing experiments in an attempt to pinpoint the problem and fix it.
Unfortunately, you cannot enroll for this activity anymore, as the enrollment period has ended.
Who, what, where, when...
- Committee for Lectures and Excursions
- [Cancelled] Case ASML: Wafer Heating
- Hal B 2B
- Wednesday 4 May 2022 from 16:00 until 20:00